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Read e-book online Advanced Technologies Based on Wave and Beam Generated PDF

By Michael A. Lieberman (auth.), H. Schlüter, A. Shivarova (eds.)

ISBN-10: 9048151910

ISBN-13: 9789048151912

ISBN-10: 9401706336

ISBN-13: 9789401706339

This quantity is predicated at the lectures on the NATO complex research Institute, entitled "Advanced applied sciences in response to Wave and Beam Generated Plasmas", held at Sozopol, Bulgaria, from could 22 until eventually June 1, 1998. It attracted nearly a hundred individuals from sixteen diversified international locations. The assembly mixed types of scientists from complex specialists to aspiring younger researchers. It geared toward stimulating destiny improvement through providing-across borders- cross-fertilization and exchanges among formerly unconnected teams. this is often mirrored within the contents of the quantity which covers the lectures given. The publication additionally includes in a moment half forty three poster displays quite often from more youthful contributors with helpful complementations and specifica­ tions to the lectures. With its themes the complicated examine Institute constitutes the 1st try to collect in an prepared demeanour 3 components of labor on plasma applied sciences: complicated efforts in keeping with wave generated---high frequency-····plasmas, on plasma assisted ion implantation and on electron beam generated plasmas.

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The coaxial line is gradually converted into a radial line enveloping a circular dielectric disk (Pyrex, 175 mm diameter, 20 mm thickness) and terminates at its circumference. This dielectric disk forms a vacuumtight window to the reactor metal chamber. The microwave power enters the dielectric disk with the E-field vector perpendicular to it. The electromagnetic field is concentrated in the form of a standing surface wave along the interface between the dielectric and the plasma which is sustained on the chamber side of the disk.

The value of 11min increases with f, but much less rapidly when v/ro is no longer much smaller than unity as gas pressure is raised [5]. Because of this minimum density requirement, increasing f leads to increasing the minimum plasma density. The loss mechanism of charged particles may then switch from ambipolar diffusion to volume recombination as n is increased. In summary, a true frequency dependence experiment requires keeping constant all discharge conditions but f and, also. either electron density or absorbed power density [25,26].

A large part of this theoretical work has been carried out by Professor Ferreira's group [45]. Recent modeling achievements further clarified the contribution to 8 from other phenomena. g. g. 48,49]. g. 46,48]. Pulsed operation ofSWDs has been investigated by the Cordoba group [50]. The investigation of magnetized SWDs has also provided significant new results. For instance, operation at f=200 MHz shows that the plasma can be ignited in the sub-mTorr regime in absence of magnetic field whereas, at 2450 MHz, it requires roc/~!

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Advanced Technologies Based on Wave and Beam Generated Plasmas by Michael A. Lieberman (auth.), H. Schlüter, A. Shivarova (eds.)


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